Transparent electrodes based on molybdenum–titanium–oxide with increased water stability for use as hole-transport/hole-injection components

Abstract Recently, dielectric/metal/dielectric (DMD) transparent electrodes based on MoO 3 have been applied in solar cells and organic light emitting diodes, by virtue of the favourable properties as hole-transport/hole-injection material. However, amorphous layers are easily dissolved water, thus inhibiting device processing with water-based solutions. To improve stability present study introduces DMD mixed molybdenum–titanium–oxide (MTO), fabricated DC magnetron sputtering from a conductive oxide target. It is demonstrated that addition Ti strongly increases while desirable electronic , specifically high work function wide bandgap, maintained. The electrodes, Ag metal layer, were both rigid flexible substrates, namely glass polyethylene terephthalate (PET). obtained low sheet resistance around 5 Ω/sq average visible transmittance well above 0.7 (including substrate). As result MTO stability, solutions takes place without electrode degradation. demonstrate process compatibility for large-scale, industrial production, DMDs sputter-deposited roll-to-roll 300 mm-wide PET foil, achieving similar laboratory-scale samples. Graphical abstract